LECVD - laser enhanced CVD

• Also called Photoassisted CVD (PCVD)
• Purpose: the laser enhances surface reactions at low temperatures
• Classification
  • Pyrolytic: the laser heats the substrate to enhance reactions, therefore the substrate should be chosen, so that it shouldn't melt
  • Photolytic: the laser increases the gas phase dissociation of molecules in order to enhance reactivity at the substrate (laser does not come in contact with substrate, but with the material jet in the vicinity of the substrate)
• Applications: variety of materials, including carbon fibers, polymers, MEMS