CVD with TEOS

• A carrier gas N₂ passes through the bubbling TEOS (tetra-ethyl-ortho-silicate - see the picture for chemical composition) and then it reaches the reactor
• A film with excellent conformality can be obtained
• It is actually a decomposition process, not a chemical reaction (C₂H₅ groups are removed and SiO₂ remains - see picture below)
• It can also react with ozone:

                               Si(C₂H₅O)₄ + 8O₃ →SiO₂ + 10H₂O +8CO₂