This task consists of the following sub-tasks:
- Choose an appropriate environment for fabricating experimental devices at low cost and explain why.
- Indicate the substrate materials used for fabricating III-V components and explain why these are preferred instead of Si wafers.
- Choose the orientation and material type most used for microelectronics devices, give the Miller indices and draw a 3-inch wafer with these properties.
- Show how the wafer cleaning takes place.
This task helps the student in defining, selecting and cleaning the wafers. Also it presents the environment in which device fabrication takes place. The wafer properties are described and their importance in device fabrication is mentioned
At the end of this task the student should be able to answer the following questions:
- What is a cleanroom?
- How can I choose the suitable wafer for my application? (the first step in device fabrication)
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Substrate preparation
