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Internet-based Performance Centred Instruction
Task Fabricating devices

Task description:

Write the process flow (the main process steps) of a device. You can select one from the four devices shown in the tutorials at this task. The order of the steps is important, also give as much as possible the parameters for each process step. Example: which type of deposition should be used or which type of etchant, etc. In order to do this use also the first five tasks.

Introduction:

Deposition, doping, lithography and etching are used in this task to make devices. The main process steps are put together in pictures showing how devices are fabricated in the cleanroom.

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