Besides gaseous sources, also liquid sources can be used for film deposition. The main methods are shortly presented in this tutorial.
Also notions about the future methods in depositing materials are shown here, due to the fact that mostly liquid sources are used. Due to the fact that structures are becoming smaller and smaller, new methods of deposition have been invented. The enginneers try to imitate the nature, in creating material and structures (biomimetic membranes), especially in self assembling monolayers and by using biological material such as ADN.