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My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
    Tutorials (6)
     Materials and material properties
     Physical Vapor Deposition
     Chemical Vapor Deposition
     Thermal growth
     Epitaxy
     Deposition and growth using liquid sources
Modifying the film properties
Lithography
Etching
Fabricating devices
Tutorial Epitaxy

Modules:

1 Theory of crystal growth
2 Various epitaxy methods

Summary

Epitaxy is a special type of deposition, although it resembles very much CVD. In epitaxy, a crystalline layer is grown on a crystalline seed. Various epitaxy processes are presented and compared.
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