My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
Tutorials
(
6
)
Materials and material properties
Physical Vapor Deposition
Chemical Vapor Deposition
Thermal growth
Epitaxy
Deposition and growth using liquid sources
Modifying the film properties
Lithography
Etching
Fabricating devices
Thermal growth
tutorial
Modules
1. Oxidation
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DEFINITION
Reaction between oxygen and a material (see
CVD
)
SiO
2
- one of the most important material in microelectronics
best quality obtained by
oxidation
, in comparison with deposition
i
nsulator
with:
Excellent
interface
with Si
Excellent
insulating
properties
Stable
Flexible bonds -
low stress
, good properties
Amorphous
structure - randomly oriented network
Easy to fabricate/find
Found in nature as
sand
1. Oxidation
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Substrate preparation
