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Thermal growth tutorial

Modules

1. Oxidation

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DEFINITION

  • Reaction between oxygen and a material (see CVD)
  • SiO2 - one of the most important material in microelectronics
    • best quality obtained by oxidation, in comparison with deposition
    • insulator with:
      • Excellent interface with Si
      • Excellent insulating properties
      • Stable
      • Flexible bonds - low stress, good properties
      • Amorphous structure - randomly oriented network
      • Easy to fabricate/find
      • Found in nature as sand

 

1. Oxidation

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