REACTIONS

Here are a few types of reactions that can take place in a CVD reactor:

• Pyrolosis: a compound dissociates (breaks bonds, or decomposes) with the application of heat

                   SiH_4(g) → Si_(s) +2H_2(g) (650oC)

• Reduction: a chemical reaction occurs by reacting a molecule with hydrogen

                   SiCl_4(g) + 2H_2(g) → Si_(s) +4HCl_(g) (1200oC)

• Oxidation: a chemical reaction of an atom or molecule with oxygen

                  SiH_4(g) + O_2(g) → SiO_2(s) +2H_2(g) (450oC)

• Reduction-oxidation (redox): a combination of reactions 3 and 4 with the formation of two new compounds

                SiCl_4(g) + CH_4(g) → SiC_(s) +4HCl_(g) (1400oC)