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Chemical Vapor Deposition tutorial

Modules

1. Theory of gas kinetics
2. Plasma
3. Principle of Chemical Vapor Deposition
4. Types of CVD

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Classification of reactions

  • Homogeneous reaction = in gas phase
    • produces a gas-product
    • if the product is solid, then the reactions can have a deletorious effect to be avoided
      • big particles can be created in the gas-phase - clusters that fall and stick on substrate, which will result in poor morphology and properties
  • Heterogeneous reaction = with formation of solid, takes place at the surface

 

The reaction rate (speed with which the reaction take place) for a reaction of the type : A + B = C + D, can be defined as:

                                         

  • depends on partial pressure of gases (pA, pB), temperature (T) and the energy required for the reaction to take place (Ea)

1. Theory of gas kinetics
2. Plasma
3. Principle of Chemical Vapor Deposition
4. Types of CVD

pages: previous | 1 2 [3] 4 5 6 | next

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