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Internet-based Performance Centred Instruction
My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
    Tutorials (6)
     Materials and material properties
     Physical Vapor Deposition
     Chemical Vapor Deposition
     Thermal growth
     Epitaxy
     Deposition and growth using liquid sources
Modifying the film properties
Lithography
Etching
Fabricating devices
Materials and material properties tutorial

Modules

1. Important film properties in technology
2. A few materials

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Structure:

  • may vary as a function of deposition techniques and conditions:
    • amorphous (no order) by PECVD
    • polycrystalline (order only for small distances) by LPCVD
    • monocrystalline (order in all film) by epitaxy

                                   

  • important for all film properties (for example, the charge carriers have lower mobility in amorphous films than in crystalline films due to high density of traps)

1. Important film properties in technology
2. A few materials

pages: previous | 1 [2] 3 4 | next
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