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Chemical Vapor Deposition tutorial

Modules

1. Theory of gas kinetics
2. Plasma
3. Principle of Chemical Vapor Deposition
4. Types of CVD

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PLASMA SHEATHS

  • Lack of electrons close to anode (almost all electrons are swollen very fast by the positive anode)
  • Lack of energetic electrons close to cathode (electrons are rejected/slowed down by the negative cathode)

Consequently, there are less ionization/excitation processes close to the cathode and anode. Therefore, due to the lack of photons, dark sheaths will be present close to the anode and cathode in a DC plasma (constant voltage applied on anode).

1. Theory of gas kinetics
2. Plasma
3. Principle of Chemical Vapor Deposition
4. Types of CVD

pages: previous | 1 2 3 [4] 5 6 | next

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