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Chemical Vapor Deposition tutorial

Modules

1. Theory of gas kinetics
2. Plasma
3. Principle of Chemical Vapor Deposition
4. Types of CVD

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PLASMA PROPERTIES

  • Plasma species: ions, radicals, neutrals, molecules, electrons
    • plasma is neutral as a total, thus: ne = ni = n, i.e. the number of electrons is equal to the number of ions
    • a degree of ionization can be defined to characterise plasma efficiency:, where n0 is the concentration of neutrals
  • Temperatures and energies
    • Electrons are more energetic than ions, because of their smaller mass (2 eV - 0.04 eV)
    • Temperature (23000 K - 500 K) of electrons/ions is defined as the energy of the particle divided by Boltzmann constant, therefore the temperature is an indicative of the electron/ion energy
    • Energy depends on a number of factors, includin the pressure; at high pressure, there are more collisions and electrons loose their energies, at low pressure there are'nt sufficient collisions to ignite and sustain the plasma

1. Theory of gas kinetics
2. Plasma
3. Principle of Chemical Vapor Deposition
4. Types of CVD

pages: previous | 1 [2] 3 4 5 6 | next

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