ALE (Atomic Layer Epitaxy)

• A single layer is deposited in a cycle
• First gas AB is introduced - only one monolayer is deposited due to the fact that there are no bonds between AB molecules, the excess gas is evaporated
• The reactor is purged and CD molecules are introduced
• The molecules react forming a single layer with AC molecules and volatile BD molecules which are removed (see animation)
• Successive cycles are nedded in order to deposit a layer with the desired thickness