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Internet-based Performance Centred Instruction
My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
    Tutorials (6)
     Materials and material properties
     Physical Vapor Deposition
     Chemical Vapor Deposition
     Thermal growth
     Epitaxy
     Deposition and growth using liquid sources
Modifying the film properties
Lithography
Etching
Fabricating devices
Epitaxy tutorial

Modules

1. Theory of crystal growth
2. Various epitaxy methods

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EPITAXY OF COMPOUND SEMICONDUCTOR

  • GaAs is formed with a solid source of Ga or GaAs
  • GaCl is formed, which is then transported to the substrate, where it reacts, forming GaAs
  • MOCVD GaAs becomes more popular
  • Application: LEDs, integration with Si

1. Theory of crystal growth
2. Various epitaxy methods

pages: previous | 1 [2] 3 4 5 6 7 | next
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