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Internet-based Performance Centred Instruction
My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
    Tutorials (6)
     Materials and material properties
     Physical Vapor Deposition
     Chemical Vapor Deposition
     Thermal growth
     Epitaxy
     Deposition and growth using liquid sources
Modifying the film properties
Lithography
Etching
Fabricating devices
Epitaxy tutorial

Modules

1. Theory of crystal growth
2. Various epitaxy methods

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LIQUID PHASE EPITAXY (LPE)

  • Crystals grow from melts (supersaturated solution)
  • Film properties:
    • High dopant concentration
    • Low defect concentration
    • Thickness ~ t1/2
  • Applications: magneto optics

1. Theory of crystal growth
2. Various epitaxy methods

pages: previous | 1 2 [3] 4 5 6 7 | next
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