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Physical Vapor Deposition tutorial

Modules

1. Evaporation processes
2. Sputtering processes

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DESCRIPTION (see animation below)

  • Argon or other gas (dark pink balls) is introduced in a low pressure chamber
  • Plasma is created by applying a high voltage between two electrodes (cathode and anode)
    • accelerated electrons (small blue balls) collide with argon atoms, creating argon ions (orange balls)
  • Ions (orange balls) are accelerated by the applied bias, gaining high energy
  • Ions (orange balls) bombard a source (cathode) and remove atoms (green balls)
  • The removed atoms (green balls) travel to the substrate (anode)
  • Atoms condense and form a film

1. Evaporation processes
2. Sputtering processes

pages: previous | 1 [2] 3 4 5 6 7 | next

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