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Physical Vapor Deposition tutorial

Modules

1. Evaporation processes
2. Sputtering processes

pages: 1 2 3 4 5 6 7 | next

DEFINITION:

Evaporation = heating a solid or liquid source so that the atoms evaporate or sublime and are transferred to a substrate, where they condense (studied by Faraday in 1857).

In the animation below, it is shown how atoms evaporate from the source, when the heater reaches a high temperature (orange colour)

Characteristics of evaporation:

  • low pressure - required for a transport without collisions from the source to the substrate
  • inexpensive - requires only a heating element and a source, thus much less expensive than a plasma, for example

1. Evaporation processes
2. Sputtering processes

pages: 1 2 3 4 5 6 7 | next

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