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Physical Vapor Deposition tutorial

Modules

1. Evaporation processes
2. Sputtering processes

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Evaporation rate can be calculated as a function of the pressure at which the material evaporates (Pe), the temperature at which the source is heated (T) and the molecular mass of the material which is evaporated (M):
αe is considered to e aproximately 1. The above formula was calculated by replacing the mass of a molecule of the source material (m) and the flux of evaporated material that leaves the source (Jx):
, where n is the concentration of molecules, νx the average velocity, kB the Boltzmann constant.

The next expressions between m and M and R and kB were used for calculations:
,   (NA is the Avogardo number)

1. Evaporation processes
2. Sputtering processes

pages: previous | 1 [2] 3 4 5 6 7 | next

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