Photoelectron effect for low energy photons (electron is emitted)
Compton effect for high energy photons (electron and photon are emitted)
The emitted electrons are called secondary electrons
X-ray lithography
After an electron is emitted X-ray lithography resembles electron beam lithography, because the electron can interact with resist in a similar way as the electron beams do in EBL
Secondary electrons from X-ray have lower energy than from electrons, thus the interaction is less spread (advantage for X-ray lithography)
Electron interaction with matter
Elastic scattering - the electron is deflected, changing the direction and size of velocity only
Inelastic scattering - which can cause excitation of the atom and even electron emission by the atom with which the electron is interacting
Substrate preparation
