Backscattering is a bigger problem, because causes the line to spread, affects the resist from the unexposed area
Solution for backscattering: using a thinner resist will cause less scattering, then the pattern is transferred to a thicker resist with less scattering underneath the thin one
Proximity effect
Effect: unintentional sputtering to neighboring areas
Isolated lines become thinner
Cause: forward sputtering
Solution: modify the dose (a larger dose has to be given for isolated thin lines, a smaller dose for the big square regions)
Substrate preparation
