IPCI logo
Internet-based Performance Centred Instruction
Advanced lithography tutorial

Modules

1. Electron beam lithography
2. X-ray lithography
3. Ion beam lithography
4. Nanolithography

pages: previous | 1 [2] 3 4 5 6 | next

Electron source

  • Electrons are extracted by:
    • Field emission - based on applying of an electric field
    • Themionic emission - based on the heating of the filament, after extraction the electrons are accelerated

                      

1. Electron beam lithography
2. X-ray lithography
3. Ion beam lithography
4. Nanolithography

pages: previous | 1 [2] 3 4 5 6 | next

go to top