Principle of electrostatic (capacitive) conversion

• Based on the interaction between the mechanical and electrical quantities in a condenser
• Condenser with one electrode fixed and the other electrode movable
• Displacement of the movable electrode can be caused
  • By an external force
    case of a sensor
  • By a voltage
    case of an actuator

Basic configurations of electrostatic transducers

• Transversal
  movable electrode displaces perpendicularly in respect to the fixed electrode
  
• Lateral
  movable electrode displaces in parallel in respect to the fixed electrode

Transversal capacitive transducer a)

Lateral capacitive transducer b)