Design a piezoresistive pressure sensor to be used for the pressure
measurement in the range from 0.5 kPa to 5 kPa.
- Give the output voltage corresponding to the pressure of 0.5 kPa.
- Provide the technical drawings showing the configuration of piezoresistive gauges.
With the help of tutorials and recommended literature:
- Choose a suitable technology for sensor fabrication,
- Give its dimensions,
- Show the configuration of piezoresistors and
- Estimate the voltage corresponding to the pressure of 0.5 kPa.
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