Design a MEMS-based single-axis capacitive accelerometer to be used for the measurement of accelerations +/-1 g in the frequency range from 10 Hz to 200 Hz.
- Give the output voltage corresponding to the acceleration of 1g.
- Provide the technical drawings showing the mechanical part of the transducer.
- Determine the electric parameters of the sensor preamplifier in order to obtain the optimal performance of the whole device.
With the help of tutorials and recommended literature:
- Choose a suitable technology for sensor fabrication,
- Give its critical dimensions, and
- Estimate the sensot output voltage before the signal preamplification corresponding to the acceleration of 1 g.
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Accelerometer
