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Electromechanical Transducers tutorial

Modules

1. Electrostatic Transducers
2. Piezoresistive Transducers

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Interdigital (comb) arrangement of capacitive transducer

Often used in the field of microsystems due to their ability to be easily fabricated by micromachining

Comb electrostatic transducer: transversal a), lateral b)

Transversal comb transducer

  • n electrodes are displaced perpendicularly to their length
  • Total inter-electrode capacitance CT is composed of two parts, CT1, CT2 in a series
  • Total capacitance at a rest:
  • Conversion factor

Lateral comb transducer

  • n electrodes are displaced in parallel to their length
  • Total inter-electrode capacitance CL is:
  • Conversion factor

1. Electrostatic Transducers
2. Piezoresistive Transducers

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