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Electromechanical Transducers tutorial

Modules

1. Electrostatic Transducers
2. Piezoresistive Transducers

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Lateral capacitive transducer

  • Movable electrode is displaced in-plane, in parallel to the electrode surface
  • Distance between the electrodes does not change
  • Common area of the electrodes is varying
  • Instantaneous capacity of the transducer is:
    rectangular electrodes of the width h and of the length l, moving in parallel to its length

Lateral capacitive transducer:
Constant voltage mode and constant charge mode
Supposing small signals

where

is the conversion factor

is a common part of length of electrodes in a rest position

Analogue circuit representation of the lateral capacitive transducer:

Similar analogue circuit representation as in the case of transversal transducer
Difference: negative compliance does not appear

1. Electrostatic Transducers
2. Piezoresistive Transducers

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