Modules
1. Electrostatic Transducers2. Piezoresistive Transducers
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Lateral capacitive transducer
Lateral capacitive transducer:Constant voltage mode and constant charge modeSupposing small signals
where
is the conversion factor
is a common part of length of electrodes in a rest position
Analogue circuit representation of the lateral capacitive transducer:
Similar analogue circuit representation as in the case of transversal transducerDifference: negative compliance does not appear