IPCI logo
Internet-based Performance Centred Instruction
Tutorial Pressure Sensors Libor RUFER

Modules:

1 Introduction to Pressure Measurement
2 Piezoresistive Pressure Sensor
3 Capacitive Pressure Sensor

Summary

In this tutorial, we will describe basic solutions used in MEMS based pressure sensors. We will overview pressure sensor technology and show different sensor configurations. The reader will learn design concepts adopted for piezoresistive pressure sensors and basic solutions used for capacitive pressure sensors.

go to top