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Tutorial Electromechanical Transducers Libor RUFER

Modules:

1 Electrostatic Transducers
2 Piezoresistive Transducers

Summary

Transducers are devices that transform one form of energy to another. In this tutorial we will develop relationships between acoustic, mechanical and electrical variables for different kinds of transducers. In the following chapters, we will describe the principles and give basic relations that are valid for types of transducers that are often used in MEMS-based applications.

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