Typical features of piezoresistive accelerometers

• High level output
• Low output impedance

Temperature Sensitivity of Piezoresistive Accelerometers

• Temperature sensitivity of the piezoresistance effect is a critical issue
• Piezoresistive accelerometers often require temperature-compensation circuitry,
  especially if used over an extensive temperature range
• Different ways that can be employed for the temperature compensation
  • Wheatstone bridge configuration was shown to be effective to reduce the temperature coefficient of offset (TCO)
  • Constant current source supply for the Wheatstone bridge is the easiest solution
    to compensate the temperature coefficient of sensitivity (TCS)
  • Passive temperature compensation using simple resistor networks
    • Can be used for the temperature ranges from 0oC to 85oC
    • Disadvantage of this method is the reduced output signal caused by voltage dividers
  • More extensive compensation networks are necessary for temperature ranges from - 40oC to 125oC

More details

Related reading

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Partridge A., Reynolds J.K., Chui B.W., Chow E.M., Fitzgerald A.M., Zhang L., Maluf N.I., Kenny T.W., "A high-performance planar piezoresistive accelerometer", J. of Microelectromechanical Systems, vol. 9, n?. 1, pp. 58-66, 2000.

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