Planar piezoresistive accelerometer fabricated with a DRIE technique :

Basic features:

• Pie-shaped proof mass attached to the sensor housing through a slender cantilevering element
• Acceleration in the plane of the sensor will cause deflections in the proof mass and flexural element
• Piezoresistive material implanted in the walls of the cantilevering element
• Flexural element is designed to concentrate strain in the vicinity of the piezoresistive implant
• Housing surrounding the proof mass is instrumental in providing a lateral stop on the mass movement
  • Setting the maximum measurable acceleration
  • Prevents deflections that would result in nonlinear flexural responses
  • Protecting the accelerometer from shock