My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
Modifying the film properties
Lithography
Etching
Tutorials
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Wet etching
Dry etching
Fabricating devices
Dry etching
tutorial
Modules
1. Plasma assisted etching
2.
Solid phase etching
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Mechanisms in plasma etching
Ions bombarding the lattice -
physical removal
of atoms
Radicals reacting with atoms -
chemical removal
of atoms
There are fewer ions than radicals in a plasma, thus the chemical mechanism may be quite important if the gas can react with the surface
the etch rate in cases when the chemical component appears is much higher than in cases where it doesn't appear
Types of plasma etch
High-pressure
Ion milling
RIE
1. Plasma assisted etching
2.
Solid phase etching
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Substrate preparation
