My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
Modifying the film properties
Lithography
Tutorials
(
2
)
Photolithography
Advanced lithography
Etching
Fabricating devices
Photolithography
tutorial
Modules
1.
Optical sources
2. Photoresists
pages:
previous
|
1
2
3
4
5
6
7
[
8
]
9
|
next
In an
automated system
an
arm
transports the wafer from the
hot plate
to the
vacuum chuck
for spin coating or
mask aligner
for exposure or the
developer
1.
Optical sources
2. Photoresists
pages:
previous
|
1
2
3
4
5
6
7
[
8
]
9
|
next
go to top
Substrate preparation
