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Internet-based Performance Centred Instruction
Photolithography tutorial

Modules

1. Optical sources
2. Photoresists

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Applying the photoresist - you can see in the picture below how photoresist is applied

  • the wafer is placed on a holder and kept there with the help of vacuum created between the holder and wafer
  • the photoresist is dispensed (5 ml) with a nozzle situated at a few cm over the center of the wafer, while the wafer is rotated with a low speed (500 rpm)
  • the dispenser is removed and a motor will spin the wafer at high velocities (3000 to 5000 rpm)
  • the excess resist is removed and a uniform film coating is obtained, while the solvent is evaporated
  • the film thickness depends on
    • Viscosity (proportional)
    • Speed (inverse proportional)

                 

                 

1. Optical sources
2. Photoresists

pages: previous | 1 2 3 [4] 5 6 7 8 9 | next

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