My Courses:
Techonolgy of microelectronic devices
Substrate preparation
Film deposition
Modifying the film properties
Tutorials
(
3
)
Diffusion
Ion implantation
Annealing
Lithography
Etching
Fabricating devices
Ion implantation
tutorial
Modules
1. Ion implantation
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DEFECTS
Point defects
: vacancies
Secondary defects
: occur during annealing - interstials agglomerate
Anneal
step has two tasks:
Repair damage
Activate dopants
The
profile changes
after annealing:
1. Ion implantation
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Substrate preparation
