Ions are stopped by nuclear collisions and electron-ion interactions (due to the small mass of electrons only the first type of interactions play an important role)
Coulomb scattering describes what happens when the incident ion aproaches the target atom (see picture below)
With each scattering process, the incident ion loses energy until it stops in the wafer
The energy loss for each collision is described by the following equation: , where Eo is the incident kinetic energy
Below is shown an animation with the implantation phenomena
the ion produces damage in the lattice, breaks bonds, dislodges atoms - the higher the mass, the higher the damage
electrons may be emitted (secondary electrons) - small green balls in the animation
the charge of the incident ion will be neutralised in the wafer by electrons
Substrate preparation
, where Eo is the incident kinetic energy
