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Tutorial Diffusion

Modules:

1 Theory of diffusion
2 Atomistic models of diffusion
3 Diffusion constant
4 Diffusion equipment and characterisation

Summary

Diffusion is a physical process encountered in all fields. In microelectronics technology it is used to modify the concentration of carriers by movement of dopants from one region to another. Fick's laws are shown and two solutions for specific cases are given. The sytems used for diffusion and characterisation are also presented in this tutorial.

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