IPCI logo
Internet-based Performance Centred Instruction
Cleanroom tutorial

Modules

1. Cleanroom

pages: [1] 2 3 4 | next


ALMOST EVERYTHING IS HAPPENING HERE!

         

DEFINITION: Cleanrooms (see above) are chambers in which huge ventilators and filters are purifying and cleaning the air.

Air circutlation in cleanroom (see picture below):

  • The air is pumped out, filtered and returned to the Clean Room.
  • The small particles stick to the fibers in the filter due to electrostatic forces, while large particles are blocked by the filter.

PURPOSE: avoid contaminationa and defects in devices.

  • Particles have to be smaller than 1/2 of the minimum feature size on wafer, in order not to influence the process. Dust particles are usually responsible for defects. Killer defects = are defects situated in the critical area of the devices, which causes the device not to function. By reducing the number of dust particles, the devices become more reliable.

1. Cleanroom

pages: [1] 2 3 4 | next

go to top