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Internet-based Performance Centred Instruction
Pressure Sensors tutorial

Modules

1. Introduction to Pressure Measurement
2. Piezoresistive Pressure Sensor
3. Capacitive Pressure Sensor

pages: previous | 1 2 3 [4] 5 6 7 | next

      • Capacitive pressure sensor with the pedestal

  • Pressure difference between two faces of the membrane
    will cause the distance change between the ring and the pedestal
  • This causes the change of ring-to-pedestal capacitance
    which is the input capacitance of an FET built into the silicon membrane

      • Capacitive pressure sensor in a touch mode

  • Useful operating range of the device is extended beyond the full-scale deflection
    that is conventionally defined by the point where DC = C
  • Electrode must be electrically isolated from the membrane,
    such as by an intervening thin film of dielectric material
  • Capacitance keeps raising even beyond the threshold at which the diaphragm touches
    the substrate beneath it

1. Introduction to Pressure Measurement
2. Piezoresistive Pressure Sensor
3. Capacitive Pressure Sensor

pages: previous | 1 2 3 [4] 5 6 7 | next

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