1 Bulk micromachining 2 Surface micromachining 3 Bonding 4 Fabrication of a capacitive pressure sensor
The pressure sensor is a type of MEMS device. What it is , how it functions, how many types of pressure sensor exist, all these questions are answered in the Microsystems course. Besides the general technology steps, there are also a few specific methods used for fabricating MEMS, such as: surface micromachining, bulk micromaching, bonding, etc. All these will be presented in the modules of this tutorial. Also, the process steps for fabricating a pressure sensor are shown.
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